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LAM Research 685-069171-100
LAM Research 685-069171-100 光谱仪是一款用于测量半导体晶圆表面化学成分的光学仪器。该光谱仪具有高精度、高可靠性和易于使用的特点，使其成为各种半导体制造应用的理想选择。
规格：
- 波长范围：185 nm 至 900 nm
- 分辨率：0.1 nm
- 检测极限：10 ppm
- 工作温度：0 至 40 °C (32 至 104 °F)
- 存储温度：-10 至 60 °C (14 至 140 °F)
- 湿度：5% 至 95% 非凝结
- 保护等级：IP65
作用：
LAM Research 685-069171-100 光谱仪可用于以下应用：
- 测量半导体晶圆表面元素成分
- 监控晶圆制造过程
- 检测晶圆缺陷
- 确保晶圆质量
特征：
- 高精度：测量精度高，可准确反映晶圆表面元素成分
- 高可靠性：采用优质材料和部件，经久耐用
- 易于使用：操作简单，无需专业培训
- 功能强大：支持多种测量和分析功能
应用领域：
LAM Research 685-069171-100 光谱仪可用于各种半导体制造应用，包括：
- 晶圆清洗
- 蚀刻
- 沉积
- 扩散
- 光刻
The LAM Research 685-069171-100 Spectrometer is an optical instrument used to measure the chemical composition of the surface of semiconductor wafers. The spectrometer features high precision, high reliability, and ease of use, making it an ideal choice for a variety of semiconductor manufacturing applications.
Specifications:
- Wavelength Range: 185 nm to 900 nm
- Resolution: 0.1 nm
- Detection Limit: 10 ppm
- Operating Temperature: 0 to 40 °C (32 to 104 °F)
- Storage Temperature: -10 to 60 °C (14 to 140 °F)
- Humidity: 5% to 95% non-condensing
- Protection Rating: IP65
Applications:
The LAM Research 685-069171-100 Spectrometer can be used in the following applications:
- Measuring the elemental composition of the surface of semiconductor wafers
- Monitoring wafer manufacturing processes
- Detecting wafer defects
- Ensuring wafer quality
Features:
- High precision: Measures with high precision, accurately reflecting the elemental composition of the wafer surface
- High reliability: Made with high-quality materials and components for long-lasting durability
- Easy to use: Simple operation without requiring professional training
- Powerful functions: Supports a variety of measurement and analysis functions
Application Areas:
The LAM Research 685-069171-100 Spectrometer can be used in a variety of semiconductor manufacturing applications, including:
- Wafer cleaning
- Etching
- Deposition
- Diffusion
- Photolithography
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