810-370141-001 LAM

Description

810-370141-001 LAM

LAM Technologies 810-370141-001 干式蚀刻腔体组件是一款用于干式蚀刻工艺的精密组件。该组件由多种材料制成，可耐受干式蚀刻过程中使用的化学品和等离子体。该组件可用于各种干式蚀刻应用，包括：

• 半导体制造：用于蚀刻晶圆上的图案
• 光电子器件制造：用于蚀刻光刻掩模
• 微机电系统 (MEMS) 制造：用于蚀刻微型结构

规格：

• 尺寸：根据具体应用而定
• 材料：多种材料，包括陶瓷、金属和聚合物
• 兼容性：各种干式蚀刻化学品和等离子体
• 应用：半导体制造、光电子器件制造、微机电系统 (MEMS) 制造

作用：

LAM Technologies 810-370141-001 干式蚀刻腔体组件在干式蚀刻工艺中起着至关重要的作用。该组件可将待蚀刻材料暴露在等离子体中，等离子体中的离子会轰击材料表面，去除材料。该组件的设计可确保均匀的蚀刻速率和良好的轮廓控制。

特征：

• 高精度：可实现高精度蚀刻
• 高可靠性：可承受苛刻的干式蚀刻环境
• 长寿命：可使用较长时间
• 易于维护：易于清洁和更换

应用领域：

LAM Technologies 810-370141-001 干式蚀刻腔体组件可用于各种工业领域，包括：

• 半导体行业：用于制造集成电路
• 光电子行业：用于制造 LED 和激光器
• MEMS 行业：用于制造传感器和执行器

The LAM Technologies 810-370141-001 Dry Etch Chamber Component is a precision component used in dry etching processes. The component is made of multiple materials that can withstand the chemicals and plasmas used in dry etching processes. The component can be used in a variety of dry etching applications, including:

• Semiconductor manufacturing: Used to etch patterns on wafers
• Optoelectronics manufacturing: Used to etch photomasks
• Microelectromechanical systems (MEMS) manufacturing: Used to etch microstructures

Specifications:

• Dimensions: Varies depending on specific application
• Materials: Multiple materials, including ceramics, metals, and polymers
• Compatibility: Various dry etch chemistries and plasmas
• Applications: Semiconductor manufacturing, optoelectronics manufacturing, microelectromechanical systems (MEMS) manufacturing

Applications:

The LAM Technologies 810-370141-001 Dry Etch Chamber Component plays a critical role in dry etching processes. The component exposes the material to be etched to a plasma, where ions in the plasma bombard the surface of the material, removing material. The component is designed to ensure uniform etch rates and good profile control.

Features:

• High precision: Enables high-precision etching
• High reliability: Can withstand harsh dry etch environments
• Long lifespan: Can be used for extended periods
• Easy to maintain: Easy to clean and replace

Applications:

The LAM Technologies 810-370141-001 Dry Etch Chamber Component can be used in various industrial fields, including:

• Semiconductor industry: Used to manufacture integrated circuits
• Optoelectronics industry: Used to manufacture LEDs and lasers
• MEMS industry: Used to manufacture sensors and actuators

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